Opto-mechanical process equipment, inspection and measurement equipment for microelectronics and MEMS fabrication:
equipment for mask pattern generation (pattern generators, mask pattern inspection and mask pattern repair);
photolithography equipment (maskless equipment, steppers, mask aligners);
inspection and inspection-and-measurement equipment (CD measurement, micro defect inspection);
equipment for chip preparation for assembly (probers, grinders, dicing saws);
assembly equipment (automatic die bonders, wire bonders, assembly inspection);
microscopy (microscopes, automated micro inspection stations);
test equipment (electromagnetic compatibility (EMC), electrical safety, moisture resistance, fire safety).