Opto-mechanical and inspection and measurement equipment for microelectronics and MEMS fabrication:
• photomask fabrication equipment (pattern generators, pattern inspection systems, pattern repair systems),
• photolithography equipment (maskless pattern generators, wafer steppers, proximity exposure tools),
• inspection and inspection-and-measurement tools (CD inspection and micro defect inspection tools),
• pre-assembly die equipment (wafer probing equipment, wafer grinders, dicing saws),
• assembly equipment (automatic die bonders, wire bonders, assembly inspection tools),
• microscopy (microscopes, automated micro inspection stations),
• test equipment (electromagnetic compatibility, electrical safety, moisture protection, fire safety).